Characterising the Radio Frequency Plasma Source for Glow Discharge Optical Emission Spectroscopy

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Spatially resolved observation of a radio-frequency-powered glow discharge plasma for emission spectrometric analysis.

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ژورنال

عنوان ژورنال: ISIJ International

سال: 2002

ISSN: 0915-1559

DOI: 10.2355/isijinternational.42.suppl_s101